At a glance
Specifications
Manufacturer-described platform characteristics. Verify the installed configuration and condition of any proposed system.
- Manufacturer
- Applied Materials
- Process
- Epitaxial silicon deposition
- Platform architecture
- Single-wafer; up to three process chambers
- Chamber technologies
- Atmospheric (ATM) and reduced pressure (RP)
- Preclean option
- Siconi preclean can be configured on the 200mm platform
Applications
The manufacturer describes ATM chambers for thin and thick blanket films and RP chambers for trench-fill applications. It also discusses low-temperature epitaxial and polycrystalline deposition.
Configuration and compatibility
Identify the installed chamber generation, gas-panel configuration, wafer-handling setup and any preclean module. The platform label does not establish the capability of a specific installed chamber.
Useful supporting records include the configuration sheet, module identifiers, wafer-handling details, included peripherals and available service history. Ask for documentation specific to the system being discussed.
What to check before buying or selling
- State the substrate, wafer size, film requirements and intended process.
- Request the installed chamber and gas-panel configuration, plus supporting documentation.
- Review available maintenance and qualification records with a qualified technical specialist.
- Define site requirements, included peripherals, installation scope and acceptance criteria before purchase.
Footprint, utility requirements, software, throughput, process performance, price and lead time depend on the exact system and project scope. Request the relevant site-planning and configuration documents when evaluating an offer.
Equipment handling and project planning
Discuss inspection, deinstallation, packing, transport and installation as part of the project scope. Identify the delivery destination, access constraints, included peripherals and the teams responsible for each handover.
Equipment-specific procedures and site requirements should come from the applicable manufacturer documentation and qualified personnel. Lync Semi can discuss logistics, technical advisory and services for select platforms.
Common questions
What details matter when comparing Centura Epi systems?
Start with the actual chamber configuration and your intended process. Request documentation that identifies the installed modules and the evidence available for their condition and capability.
Can Lync Semi discuss a specific system rather than a platform family?
Yes. Include the model designation, configuration sheet and relevant photographs in your request. The team can discuss sourcing, selling or support requirements for that configuration.
Source documents
Platform facts are summarized from the manufacturer reference below. The checklist and project questions are Lync Semi guidance for evaluating a particular system.
Applied Materials — Centura Epi 200mmManufacturer product and platform names belong to their respective owners. This independent guide does not imply manufacturer authorization or certification.
Move your Centura Epi 200mm project forward.
Get pricing and sourcing options with your equipment already selected.
Get a private quote